Abstract: We successfully demonstrated a straightforward spin-on technique for the epitaxially grown electro-optical thin films on the SiO 2 /Si substrates. After process optimization, we obtained a c ...
Abstract: Silicon self-implantation technique is applied to passivate the defects in the grain boundaries of the polycrystalline silicon (poly-Si) thin film. The implantation of Si with low dose is a ...
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